基于多源异构数据的关键核心技术识别研究——以光刻技术为例

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Abstract This paper constructs a model for identifying key core technologies based on multi-source heterogeneous data.By collecting and analyzing papers,patents,and news on lithography technology,and relying on the LDA model,structural hole theory,and indicator combination analysis method,four indicators are constructed to reflect the growth,innovation,value,and stability of technology,namely,technology topic intensity,technology level degree,technology value degree,and technology value stability.This enables the identification of key core technologies in the field of lithography technology.The research results show that 17,25,and 32 technology topics are identified from papers,patents,and news in the field of lithography technology,respectively.Through indicator combination analysis,nine key core technologies in the field of lithography technology are identified as:nanochip manufacturing technology,thin film heat treatment technology,EUV lithography technology,self-assembly scanning technology,semiconductor device structure research,scanning imaging technology,lithography pattern preparation method,lithography image quality inspection,and mask lithography technology.Finally,the validity of the model is verified by literature research to evaluate the identification results of the model,and the conclusion can provide reference and learning for subsequent research.

Key words： Key core technology Multi-source heterogeneous data Technology identification Lithography technology

Received: 17 January 2024

PACS:	F204
	G350

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	Articles by authors
	Xu Zonghuang
	Li Xiaole
	Shi Jin
	Zhou Hailing

Cite this article:

Xu Zonghuang,Li Xiaole,Shi Jin, et al. Identifying Key Core Technologies Using Multi-source Heterogeneous Data ——A Case Study on Lithography Technology[J]. , 2024, 5(12): 127-136.

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http://www.zgkjlt.org.cn/EN/ OR http://www.zgkjlt.org.cn/EN/Y2024/V5/I12/127

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